REVIEW: MEMS and Its Applications for Flow Control

[+] Author and Article Information
Chih-Ming Ho

Mechanical and Aerospace Engineering Department, University of California, Los Angeles, Los Angeles, CA 90095

Yu-Chong Tai

Division of Engineering and Applied Science, California Institute of Technology, Pasadena, CA 91125

J. Fluids Eng 118(3), 437-447 (Sep 01, 1996) (11 pages) doi:10.1115/1.2817778 History: Received October 25, 1995; Revised June 10, 1996; Online December 04, 2007


Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of all areas of science. Furthermore, these miniature transducers can be integrated with microelectronics. With an integrated system, it then becomes possible to complete the loop of sensing, information processing, and actuation. This type of system enables us to perform real-time control of time varying events which are common in fluid dynamics. In this review paper, we will first briefly introduce Micro-Electro-Mechanical-Systems (MEMS) technology. Then, the applications of MEMS to flow control will be discussed.

Copyright © 1996 by The American Society of Mechanical Engineers
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