Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method

[+] Author and Article Information
E. S. Piekos, K. S. Breuer

Department of Aeronautics and Astronautics, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139

J. Fluids Eng 118(3), 464-469 (Sep 01, 1996) (6 pages) doi:10.1115/1.2817781 History: Received June 03, 1996; Revised June 10, 1996; Online December 04, 2007


A direct simulation Monte Carlo (DSMC) investigation of flows related to microelectromechanical systems (MEMS) is detailed. This effort is intended to provide tools to facilitate the design and optimization of micro-devices as well as to probe the effects of rarefaction, especially in regimes not amenable to other means of analysis. The code written for this purpose employs an unstructured grid, a trajectory-tracing particle movement scheme, and an “infinite channel” boundary formulation. Its results for slip-flow and transition regime micro-channels and a micro-nozzle are presented to demonstrate its capabilities.

Copyright © 1996 by The American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.





Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In