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RESEARCH PAPERS

Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method

[+] Author and Article Information
E. S. Piekos, K. S. Breuer

Department of Aeronautics and Astronautics, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139

J. Fluids Eng 118(3), 464-469 (Sep 01, 1996) (6 pages) doi:10.1115/1.2817781 History: Received June 03, 1996; Revised June 10, 1996; Online December 04, 2007

Abstract

A direct simulation Monte Carlo (DSMC) investigation of flows related to microelectromechanical systems (MEMS) is detailed. This effort is intended to provide tools to facilitate the design and optimization of micro-devices as well as to probe the effects of rarefaction, especially in regimes not amenable to other means of analysis. The code written for this purpose employs an unstructured grid, a trajectory-tracing particle movement scheme, and an “infinite channel” boundary formulation. Its results for slip-flow and transition regime micro-channels and a micro-nozzle are presented to demonstrate its capabilities.

Copyright © 1996 by The American Society of Mechanical Engineers
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