Experimental and Numerical Investigation Into the Flow Characteristics of Channels Etched in 〈100〉 Silicon

[+] Author and Article Information
S. M. Flockhart, R. S. Dhariwal

Department of Computing and Electrical Engineering, Heriot-Watt University, Riccarton, Edinburgh, Scotland, UK, EH14 4AS

J. Fluids Eng 120(2), 291-295 (Jun 01, 1998) (5 pages) doi:10.1115/1.2820647 History: Received November 21, 1996; Revised December 04, 1997; Online December 04, 2007


This paper describes the experimental and numerical techniques utilized to determine the flow characteristics of a series of trapezoidal channels. The channels, with hydraulic diameters ranging from 50 to 120 μm, are fabricated in silicon using micro fabrication technology. During this investigation the flow results, using distilled water as the test fluid, were kept well within the laminar flow regime, with the experimental results not exceeding a Reynolds number of 600. In order to compare the experimental results to the theoretical response, a numerical technique is employed to determine the predicted flow. This essentially involves solving the unknown coefficients of the Dirichlet equation using a numerical method called the Householder Transformation. The numerical results, provide a comparison to the experimental results and allows us to determine whether flow in channels of these dimensions, fabricated in silicon, produce results comparable to the predicted theoretical response.

Copyright © 1998 by The American Society of Mechanical Engineers
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