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RESEARCH PAPERS

Thermoelectrically Driven Melt Motion During Floating Zone Crystal Growth With an Axial Magnetic Field

[+] Author and Article Information
Y. Y. Khine, J. S. Walker

Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, Il 61801

J. Fluids Eng 120(4), 839-843 (Dec 01, 1998) (5 pages) doi:10.1115/1.2820748 History: Received January 27, 1998; Revised August 18, 1998; Online December 04, 2007

Abstract

During semiconductor crystal growth with an externally applied magnetic field, thermoelectric currents may drive a melt circulation which affects the properties of the crystal. This paper treats a model problem for a floating zone process with a uniform axial magnetic field, with planar solid-liquid interfaces, with a cylindrical free surface, with a parabolic temperature variation along the crystal-melt interface, and with an isothermal feed rod-melt interface. The ratio of the electrical conductivities of the liquid and solid is a key parameter. The azimuthal velocity is much larger than the radial or axial velocity. There is radially outward flow near the crystal-melt interface which should be beneficial for the mass transport of dopants and species.

Copyright © 1998 by The American Society of Mechanical Engineers
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