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TECHNICAL PAPERS

A Piezoelectric Valve-Less Pump-Dynamic Model

[+] Author and Article Information
Amos Ullmann, Yehuda Taitel

Department of Fluid Mechanics and Heat Transfer, Faculty of Engineering, Tel-Aviv University, Ramat-Aviv 69978, Israel

Ilan Fono

Micro Infusion Ltd, 2a Katzir Street, Tel-Hashomer, Ramat Gan 52656, Israel

J. Fluids Eng 123(1), 92-98 (Nov 01, 2000) (7 pages) doi:10.1115/1.1343459 History: Received December 30, 1999; Revised November 01, 2000
Copyright © 2001 by ASME
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References

Shuchi,  S., and Esashi,  M. E., 1994, “Microflow devices and systems,” J. Micromech. Microeng.,4, pp. 157–171.
Gerlach,  T., Schuenemann,  M., and Wurmus,  H., 1995, “A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves,” J. Micromech. Microeng., 6, pp. 199–201.
Olsson,  A., Enoksson,  P., Stemme,  G., and Stemme,  E., 1996, “A valve-less planar pump isotropically etched in silicon,” J. Micromech. Microeng., 6, pp. 87–91.
Heschell,  M., Müllenborn,  M., and Bouwstra,  S., 1997, “Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon,” J. Microelectromech. Syst., 6, pp. 41–46.
Olsson,  A., Enoksson,  P., Stemme,  G., and Stemme,  E., 1997, “Micromachined flat-walled valveless diffuser pumps,” J. Microelectromech. Syst., 6, pp. 161–166.
Stemme,  E., and Stemme,  G., 1993, “A valveless diffuser/nozzle-based fluid pump,” Sens. Actuators A, 39, pp. 159–167.
Olsson,  A., Stemme,  G., and Stemme,  E., 1995, “A valve-less planar fluid pump with two pumps chambers,” Sens. Actuators A, 46/47, pp. 549–556.
Ullmann,  A., 1998, “The piezoelectric valve-less pump-Performance enhancement analysis,” Sens. Actuators A, 69/1, pp. 97–105.
Olsson,  A., Stemme,  G., and Stemme,  E., 1999, “A numerical design study of the valveless diffuser pump using a lumped-mass model,” J. Micromech. Microeng., 9, pp. 34–44.
Timoshenko S., 1940, Theory of Plates and Shells, McGraw-Hill, New York.

Figures

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The valve-less pump, schematic description for the calculation of the natural frequency
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Detailed design of the piezoelectric valve
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Schematic valve-less pump structure
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Flow rate against the driving frequency, comparison with experiments
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Maximum pressure against the driving frequency, comparison with experiments
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Pump performance, theoretical
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Central amplitude of the piezoelectric membrane
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Pump performance, comparison with experiment, Stemme and Stemme 6 Model B
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Pump performance, comparison with experiment, Stemme and Stemme 6 Model A

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