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TECHNICAL BRIEFS

Simulation and Analysis of a Magnetoelastically Driven Micro-Pump

[+] Author and Article Information
A. Beskok, A. R. Srinivasa

Mechanical Engineering Department, Texas A&M University, College Station, TX 77843

J. Fluids Eng 123(2), 435-438 (Oct 23, 2000) (4 pages) doi:10.1115/1.1363700 History: Received April 01, 1999; Revised October 23, 2000
Copyright © 2001 by ASME
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References

Van Lintel,  H. T. G., Van de Pol,  F. C. M., and Bouwstra,  S., 1988, “A piezoelectric micropump based on micromachining of silicon,” Sens. Actuators, 15, pp. 153–167.
Esashi,  M., Shoji,  S., and Nakano,  A., 1989, “Normally closed microvalve fabricated on a silicon wafer,” Sens. Actuators, 20, pp. 163–169.
Smits,  J. G., 1990, “Piezoelectric micropump with three valves working peristaltically,” Sens. Actuators A, 21–23, pp. 203–206.
Sen,  M., Wajerski,  D., and Gad el Hak,  M., 1996, “A novel pump for MEMS applications,” ASME J. Fluids Eng., 118, pp. 624–627.
Beskok A., and Warburton T. C., 2001, “An unstructured h/p finite element scheme for fluid flow and heat transfer in moving domains,” Submitted to Journal of Computational Physics.
Karniadakis, G. E., and Sherwin, S. J., 1999, Spectral/hp Element Methods for CFD, Oxford University Press.
Papavasiliou, A. P., Liepmann D., and Pisano, A. P., 1999, “Fabrication of a free floating silicon gate valve,” Proceedings of ASME IMECE Meeting, MEMS. Vol. 1, pp. 265–274.

Figures

Grahic Jump Location
Sketch of the micro-pump operating between two micro-channel systems
Grahic Jump Location
Top: deflection of the membrane. Bottom: position of the valve tips during a pump cycle.
Grahic Jump Location
Nondimensional volumetric flowrate variation with in a period of the micro-pump, as a function of the Reynolds number, Re=a2ω/ν for (a/L=1/10,a/h=1/3)

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