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TECHNICAL BRIEFS

Flow Characteristics of the Molecular Pump of Holweck Type in the Slip Regime

[+] Author and Article Information
Yeng-Yung Tsui, Yuan-Sheng Su

Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan R.O.C.

Hong-Ping Cheng

Department of Air-Conditioning and Refrigeration Engineering, National Taipei University of Technology, Taipei 100, Taiwan R.O.C.

J. Fluids Eng 124(1), 287-290 (Aug 10, 2001) (4 pages) doi:10.1115/1.1431268 History: Received July 07, 2000; Revised August 10, 2001
Copyright © 2002 by ASME
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References

Kruger, C. H., and Shapiro, A. H., 1960, “Vacuum Pumping with a Bladed Axial-Flow Turbo-Machine,” 7th Nat. Symp. Vac. Techn. Transaqct., pp. 6–12.
Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford.
Tsui,  Y.-Y., Wu,  P.-W., and Liao,  C.-W., 1994, “Flow Modeling in Turbofan Mixing Duct,” Numer. Heat Transfer, Part A, 26, pp. 219–236.
Rhie,  C. M., and Chow,  W. L., 1983, “A Numerical Study of the Turbulent Flow Past an Isolated Airfoil with Trailing Edge Separation,” AIAA J., 21, pp. 1525–1532.
Nanbu,  K., and Igarashi,  S., 1992, “Three-Dimensional Low-Density Flows in the Spiral Grooves of a Turbo-Molecular Pump,” Comput. Fluids, 21, pp. 221–228.

Figures

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A schematic drawing of the pump and the flow channels
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Comparison of the pressure rise with measurements
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Illustration of the momentum balance over the entire flow channel
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Pressure variation along the channel for (a) various clearances; (b) various spiral angles; (c) various channel heights; (d) a linear reduction of channel height from 6mm to 4 mm; (e) various channel numbers; (f) various rotational speeds

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