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ADDITIONAL TECHNICAL PAPERS

MEMS-Micropumps: A Review

[+] Author and Article Information
Nam-Trung Nguyen, Xiaoyang Huang, Toh Kok Chuan

School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798

J. Fluids Eng 124(2), 384-392 (May 28, 2002) (9 pages) doi:10.1115/1.1459075 History: Received August 07, 2000; Revised November 07, 2001; Online May 28, 2002
Copyright © 2002 by ASME
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References

Figures

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General structure of a micro check-valve pump
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Check-valve micropumps: (a) piezoelectric actuator with ring mesa valves; (b) pneumatic actuator with polyimide disk valves; (c) pneumatic actuator with membrane valves; (d) pneumatic actuator with rubber membrane and parylene disk valves; (e) piezoelectric actuator with polysilicon disk valves; (f ) electrostatic actuator with silicon cantilever valves; (g) piezoelectric actuator silicon cantilever valves; (h, i, j) piezoelectric actuator with ring mesa valves.
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Realization examples of peristaltic micropumps (not to scale): (a) piezoelectric actuators with glass membrane; (b) electrostatic actuators with polysilicon membrane; (c) thermopneumatic actuators with silicon membrane; (d) thermopneumatic actuators with silicon membrane and fiber guided laser as heat source; (e) thermopneumatic actuators with rubber membrane; (f ) electrostatic actuators with curved electrodes.
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Realization examples of valveless rectification micro pumps (not to scale): (a) piezoelectric actuator with external diffuser/nozzle elements; (b) piezoelectric actuator with planar integrated diffuser/nozzle elements; (c) piezoelectric actuator with vertical diffuser/nozzle elements; (d) thermoelectric actuators with corrugated membrane and vertical diffuser/nozzle elements.
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Principles of electrohydrodynamic pumps
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Magnetohydrodynamic pump: (a) schematic of concept, (b) design example, fluid flows out of page plane
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Flow rate versus typical size for mechanical pumps (the numbers indicate the corresponding references)
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Flow rate versus typical size for non-mechanical pumps (the numbers indicate the corresponding references)
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Maximum Reynolds number versus typical size
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Pumped energy per stroke versus typical size (filled figures indicate that the pumps use piezoelectric actuators)
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Maximum back pressure versus maximum flow rate (the numbers indicate the corresponding references)

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