Pressure Drops of Water Flow Through Micromachined Particle Filters

[+] Author and Article Information
Tzung K. Hsiai

Department of Biomedical Engineering and Division of Cardiovascular Medicine, School of Engineering and Keck School of Medicine, Los Angeles, CA 90089-1451

Sung Kwon Cho, Joon Mo Yang, Chih-Ming Ho

Mechanical and Aerospace Engineering Department, University of California, Los Angeles, CA 90095

Xing Yang, Yu-Chong Tai

Department of Electrical Engineering, California Institute of Technology, Pasadena, CA 91125

J. Fluids Eng 124(4), 1053-1056 (Dec 04, 2002) (4 pages) doi:10.1115/1.1514209 History: Received October 19, 2000; Revised May 16, 2002; Online December 04, 2002
Copyright © 2002 by ASME
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Grahic Jump Location
Fabricated MEMS Filters with circular holes and thickness of 3 μm: (a) photographs of the MEMS Filter (b) geometric factors in the MEMS Filter (not to scale) (c) side-wall profiles and SEM pictures of the filtering hole
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(a) Image of the MEMS filtering holes by WYKO surface profiler and (b) probability density function of the hole size for MEMS Filter I (see Table 1)
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The measured pressure drop of MEMS filters in comparison with nondimensionalized numerical formula (Eq. (1)). (Uncertainty in Kβ2/(3.5t/D+3)±6.6% and in ReD±3.3%).




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