0
TECHNICAL PAPERS

Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump

[+] Author and Article Information
Mohammad I. Kilani, Yousef S. Haik, Ching-Jen Chen

Mechanical Engineering Department, Florida State University, Tallahassee, FL 32310

Paul C. Galambos

Intelligent Micromachine Department, Sandia National Laboratories, Albuquerque, NM 87185

J. Fluids Eng 125(2), 339-344 (Mar 27, 2003) (6 pages) doi:10.1115/1.1524582 History: Received April 09, 2002; Revised August 06, 2002; Online March 27, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Sen,  M., Wajerski,  D., and Gad-El-Hak,  M., 1996, “A Novel Pump for MEMS Applications,” ASME J. Fluids Eng., 118, pp. 624–627.
Sharachandra,  M. C., Sen,  M., and Gad-Elhak,  M., 1997, “Navier-Stokes Simulations of a Novel Viscous Pump,” ASME J. Fluids Eng., 119, pp. 372–382.
Day,  R., and Stone,  H., 2000, “Lubrication Analysis and Boundary Integral Simulations of a Viscous Micropump,” J. Fluid Mech., 416, pp. 197–216.
Garcia,  E., and Sniegowski,  J., 1995, “Surface Micromachined Microengines,” Sens. Actuators, 48, pp. 203–214.
Dean,  W. R., 1927, “Note on the Motion of Fluid in a Curved Pipe,” Philos. Mag., 4, pp. 208–219.
Leal, L. G., 1992, Laminar Flow and Convective Transport Processes: Scaling Principles and Asymptotic Analysis, Butterworth-Heinemann, Boston, MA.
Batchelor, G. K., 1967, An Introduction to Fluid Dynamics, Cambridge University Press, Cambridge, UK.

Figures

Grahic Jump Location
Determination of the spiral angle
Grahic Jump Location
Two-dimensional flow model
Grahic Jump Location
Axial velocity profiles at zero pressure head
Grahic Jump Location
Flow rate–pressure head experimental setup
Grahic Jump Location
Theoretical and experimental flow rates
Grahic Jump Location
The spiral pump concept
Grahic Jump Location
An example spiral micropump fabricated in SUMMiT
Grahic Jump Location
A cross section through the spiral micropump (vertical dimension magnified to show film details)

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In