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TECHNICAL PAPERS

Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump

[+] Author and Article Information
Mohammad I. Kilani, Yousef S. Haik, Ching-Jen Chen

Mechanical Engineering Department, Florida State University, Tallahassee, FL 32310

Paul C. Galambos

Intelligent Micromachine Department, Sandia National Laboratories, Albuquerque, NM 87185

J. Fluids Eng 125(2), 339-344 (Mar 27, 2003) (6 pages) doi:10.1115/1.1524582 History: Received April 09, 2002; Revised August 06, 2002; Online March 27, 2003
Copyright © 2003 by ASME
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References

Figures

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The spiral pump concept
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An example spiral micropump fabricated in SUMMiT
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A cross section through the spiral micropump (vertical dimension magnified to show film details)
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Determination of the spiral angle
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Two-dimensional flow model
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Axial velocity profiles at zero pressure head
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Flow rate–pressure head experimental setup
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Theoretical and experimental flow rates

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