Computational Fluid Dynamics Performance Estimation of Turbo Booster Vacuum Pump

[+] Author and Article Information
H.-P. Cheng

Department of Air Conditioning and Refrigeration Engineering, National Taipei University of Technology, 1 Sec. 3., Chung-Hsiao E. Road, Taipei 106, Taiwan, R.O.C. e-mail: hpcheng@ntut.edu.tw

C.-J. Chen

Precision Instrument Development Center, National Science Council, 20 R&D Road VI, Science-Based Industrial Park, Hsinchu 300, Taiwan R.O.C.

P.-W. Cheng

Department of Air Conditioning and Refrigeration Engineering, National Taipei University of Technology, Taipei 106, Taiwan R.O.C.

J. Fluids Eng 125(3), 586-589 (Jun 09, 2003) (4 pages) doi:10.1115/1.1566042 History: Received December 15, 1999; Revised July 05, 2002; Online June 09, 2003
Copyright © 2003 by ASME
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Schematic diagram for the cross section of the turbo molecular pump
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Physical dimensions of the rotor: A: turbo blade design area (x/L: 0.0∼0.229) B: connection area (x/L:0.229∼0.403) C: helical-grooved design area (x/L:0.403∼1.0) L: axial length of rotor (201 mm) X,x1,x2,[[ellipsis]],x10: axial distance downstream of the pump inlet port t1,t2,[[ellipsis]],t10: blade thickness (A:2 mm, B: 2∼5.6 mm, C: 5.6 mm) α12,[[ellipsis]],α10: spiral angle of blade (A, B: 30°, C: 30° ∼12.5°)
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Computational mesh: Block 1: upstream extended grid (vacuum chamber) Block 2: spiral flow passage of rotor Block 3: downstream extended grid P: periodical boundary condition
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(a) Axial velocity contours for cases 1, and 10 (N=24,000 rpm); (b) pressure distributions for cases 1, and 10 (N=24,000 rpm)
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Calculated inlet pressure (P1) and compression ratio as a function of the throughput for cases 1 to 10 (N=24,000 rpm, Pe=0.665 mbar)
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Pumping volume flow rate as a function of calculated inlet pressure (P1) for cases 1 to 16—Parameters: rotor rotational speed (rpm) and mass flow rate (SCCM)



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