Laminar Liquid Flow Through Silicon Microchannels

[+] Author and Article Information
Gian Luca Morini

DIENCA-Università degli Studi di Bologna, Viale Risorgimento 2, 40136 Bologna, Italye-mail: gianluca.morini@mail.ing.unibo.it

J. Fluids Eng 126(3), 485-489 (Jul 12, 2004) (5 pages) doi:10.1115/1.1760545 History: Received December 26, 2002; Revised November 08, 2003; Online July 12, 2004
Copyright © 2004 by ASME
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Schematic representation of the microchannel cross- sections
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Comparison between the present numerical results and Ulrich’s correlation 20 for the geometry coefficient CR of a 〈100〉 silicon trapezoidal microchannel
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Comparison with the correlation of Damean and Regtien 21 for a double-trapezoidal silicon microchannel having ϕ=54.74 deg
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Comparison between the present numerical results for 〈100〉 silicon microchannels and the experimental data of Wu and Cheng 14




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