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TECHNICAL PAPERS

Design, Fabrication, and Characterization of a Micro Vapor-Jet Vacuum Pump

[+] Author and Article Information
Marco Doms

Institute of Microsystems Technology, Hamburg-Harburg University of Technology, Hamburg 21073, Germanym.doms@tuhh.de

Jörg Müller

Institute of Microsystems Technology, Hamburg-Harburg University of Technology, Hamburg 21073, Germanymueller@tuhh.de

J. Fluids Eng 129(10), 1339-1345 (May 22, 2007) (7 pages) doi:10.1115/1.2776968 History: Received August 23, 2006; Revised May 22, 2007

A microelectromechanical system (MEMS) vapor-jet pump for vacuum generation in miniaturized analytical systems, e.g., micro-mass-spectrometers (Wapelhorst, E., Hauschild, J., and Mueller, J., 2005, “A Fully Integrated Micro Mass Spectrometer  ,” in Fifth Workshop on Harsh-Environment Mass Spectrometry;Hauschild, J., Wapelhorst, E., and Mueller, J., 2005, “A Fully Integrated Plasma Electron Source for Micro Mass Spectrometers  ,” in Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS), pp. 476–478), is presented. A high velocity nitrogen or water vapor jet is used for vacuum generation. Starting from atmospheric pressure, a high throughput of more than 23mlmin and an ultimate pressure of 495mbars were obtained with this new type of micropump. An approach for the full integration of all components of the pump is presented and validated by experimental results. The pump is fabricated from silicon and glass substrates using standard MEMS fabrication techniques including deep reactive ion etching, trichlorosilane molecular vapor deposition, and metal-assisted chemical etching for porous silicon fabrication. Micromachined pressure sensors based on the Pirani principle have been developed and integrated into the pump for monitoring.

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Copyright © 2007 by American Society of Mechanical Engineers
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References

Figures

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Figure 1

Schematic diagram of a macroscopic diffusion pump

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Figure 2

Schematic drawing of the nozzle-sidewall region of the micropump (top view). See Fig. 4 for the location of this region.

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Figure 3

Sectional drawing of the micro vapor-jet pump (side view)

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Figure 4

The pumping unit (top view). The white box indicates the position of the geometry from Fig. 2.

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Figure 5

Working fluid transport system and pirani pressure sensor (top view)

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Figure 6

Theoretical pressure dependent thermal conductivity for different distances between the heated bridge and the substrate

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Figure 7

Ultimate pressure as a function of N2 supply pressure for different sidewall angles

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Figure 8

Ultimate pressure as a function of N2 supply pressure p0 for different distances between nozzle and sidewall (5deg sidewall angle)

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Figure 9

Throughput as a function of N2 supply pressure p0 (5deg sidewall angle)

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Figure 10

Ultimate pressure as a function of water vapor and nitrogen gas supply pressures (5deg sidewall angle, d=125μm)

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Figure 11

Pressure generated by the heater from Fig. 5 as a function of supplied electrical power

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Figure 12

Temperature of the heater as a function of supplied power

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Figure 13

Voltage-pressure characteristics of two pirani pressure sensors with different gap widths (Vinconst=5V, bridge geometry: 8×100μm2)

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Figure 14

The complete micropump consisting of the systems from Figs.  45

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