Hydrodynamic cavitation downstream a range of micropillar geometries entrenched in a microchannel were studied experimentally. Pressurized helium gas at the inlet tank and vacuum pressure at the outlet propelled distilled water through the device and trigger cavitation. The entire process from cavitation inception to the development of elongated attached cavity was recorded. Three modes of cavitation inception were observed and key parameters of cavitation processes, such as cavity length and angle of attachment, were compared among various micropillar geometries. Cavitation downstream of a triangular micropillar was found to have a distinct inception mode with relatively high cavitation inception numbers. After reaching its full elongated form, it prevailed through a larger system pressures and possessed the longest attached cavity. Cavity angle of attachments was predominantly related to the shape of the micropillar. Micropillars with sharp vertex led to lower cavity attachment angles close to the flow separation point, while circular micropillars resulted in higher angles. Twin circular micropillars have a unique cavitation pattern that was affected by vortex shedding. Fast Fourier transformation (FFT) analysis of the cavity image intensity revealed transverse cavity shedding frequencies in various geometries and provided an estimation for vortex shedding frequencies.