The friction process of superlubricity (μ = 0.004) obtained by phosphoric acid solution has been investigated by a traditional tribometer. The evolution of friction coefficient with time indicates that the friction process of superlubricity is divided into three stages, i.e. friction reducing rapidly process, low friction process and superlubricity process. The feature of these three stages is discussed according to several experiments. The result indicates that the contact region in superlubricity state is a three layer structure formed after the first stage and the second stage, which is the origin of ultra-low friction.

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