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Proceedings Papers

Influence of Surface Roughness on Traction and Scuffing Performance of Lubricated Contacts for Aerospace and Automotive Gearing

Sam Shon, Ahmet Kahraman, Kelsen LaBerge, Brian Dykas, David Stringer

Proc. ASME. IJTC2012, ASME/STLE 2012 International Joint Tribology Conference, 87-89, October 7–10, 2012

Paper No: IJTC2012-61212

DOI: https://doi.org/10.1115/IJTC2012-61212

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Topics: Aerospace industry, Surface roughness, Traction, Gears, Polishing, Steel, Automotive transmissions, Disks, Lubricants, Mirrors

Proceedings Papers

Effect of Surface Microtexturing on Friction at Unidirectional Sliding Depending on Lubricant Viscosity

Karl-Heinz Zum Gahr, Mario Mann

Proc. ASME. IJTC2012, ASME/STLE 2012 International Joint Tribology Conference, 57-59, October 7–10, 2012

Paper No: IJTC2012-61042

DOI: https://doi.org/10.1115/IJTC2012-61042

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Topics: Friction, Lubricants, Viscosity, Disks, Sapphire, Texture (Materials), Water, Film thickness, Geometry, Laser ablation

Proceedings Papers

Development of the GranOO Discrete Element Platform for Dynamic Problems: Application for Tribological Application

Ivan Iordanoff, Jean Luc Charles, Damien Andre

Proc. ASME. IJTC2012, ASME/STLE 2012 International Joint Tribology Conference, 325-329, October 7–10, 2012

Paper No: IJTC2012-61200

DOI: https://doi.org/10.1115/IJTC2012-61200

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Topics: Tribology, Particulate matter, Wear, Damage, Differential equations, Electric potential, Engineering simulation, Flow (Dynamics), Licensing, Magnetic moment

Proceedings Papers

On Polishing and Erosion of Aluminum Substrates by a Jet of Alumina Slurry

Shreyansh Patel, Sinan Mu¨ftu¨

Proc. ASME. IJTC2011, ASME/STLE 2011 Joint Tribology Conference, 369-371, October 24–26, 2011

Paper No: IJTC2011-61082

DOI: https://doi.org/10.1115/IJTC2011-61082

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Topics: Aluminum, Erosion, Polishing, Slurries, Computational fluid dynamics, Surface roughness, Jets, Metal surfaces, Particulate matter, Pressure

Proceedings Papers

Effect of Surface Texturing on EHD Lubrication Films Under Transient Speed Condition

Martin Zimmerman, Ivan Krupka, Martin Hartl, Pavel Houska

Proc. ASME. IJTC2011, ASME/STLE 2011 Joint Tribology Conference, 187-189, October 24–26, 2011

Paper No: IJTC2011-61046

DOI: https://doi.org/10.1115/IJTC2011-61046

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Topics: Lubrication, Transients (Dynamics), Lubricants, Film thickness, Cams, Damage, Disks, Gears, Glass, Interferometry

Proceedings Papers

Studies on Friction and Transfer Layer Formation When Pure Magnesium Pins Slid at Various Numbers of Cycles on Steel Plates of Different Surface Texture

Pradeep L. Menezes, Kishore, Satish V. Kailas, Michael R. Lovell

Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 263-265, October 17–20, 2010

Paper No: IJTC2010-41284

DOI: https://doi.org/10.1115/IJTC2010-41284

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Topics: Cycles, Friction, Magnesium (Metal), Pins (Engineering), Plates (structures), Steel, Surface texture, Texture (Materials), Stick-slip, Lubrication

Proceedings Papers

The Film Formation Mechanism of High Water-Based Emulsions

Jianbin Luo, Liran Ma

Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 439-441, October 17–20, 2010

Paper No: IJTC2010-41283

DOI: https://doi.org/10.1115/IJTC2010-41283

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Topics: Emulsions, Water, Cutting, Lubricants, Metals, Metalworking, Polishing, Steel

Proceedings Papers

Axiomatic Design of a Multi-Directional Motion Pin on Disk Apparatus for Biotribology Study

Zikai Hua, Jianhua Zhang

Proc. ASME. IJTC2010, STLE/ASME 2010 International Joint Tribology Conference, 37-39, October 17–20, 2010

Paper No: IJTC2010-41039

DOI: https://doi.org/10.1115/IJTC2010-41039

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Topics: Biotribology, Design, Disks, Wear, Adhesives, Artificial limbs, Control systems, Molecular weight, Pins (Engineering), Polishing

Proceedings Papers

A Multi-Physics Computational Framework to Predict Dishing and Erosion in Patterned Wafers

Jeremiah N. Mpagazehe, Geo A. Thukalil, C. Fred Higgs, III

Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 27-29, October 19–21, 2009

Paper No: IJTC2009-15205

DOI: https://doi.org/10.1115/IJTC2009-15205

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Topics: Erosion, Physics, Semiconductor wafers, Electrical properties, Integrated circuits, Lubrication, Particulate matter, Polishing

Proceedings Papers

The Effect of Micro Dent Arrays Fabricated by Laser Shock Peening on Tribology

R. Caslaru, Y. B. Guo

Proc. ASME. IJTC2009, ASME/STLE 2009 International Joint Tribology Conference, 451-453, October 19–21, 2009

Paper No: IJTC2009-15113

DOI: https://doi.org/10.1115/IJTC2009-15113

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Topics: Laser hardening, Tribology, Friction, Density, Fracture (Materials), Lubricants, Microhardness, Micromachining, Polishing, Reservoirs

Proceedings Papers

A Probabilistic Analysis of Third-Body Particle Embedment: Implications in Lapping of Magnetic Recording Heads

H. Xu, K. Komvopoulos

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 169-171, October 20–22, 2008

Paper No: IJTC2008-71242

DOI: https://doi.org/10.1115/IJTC2008-71242

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Topics: Grinding, Magnetic recording, Particulate matter, Polishing, Density, Fluids, Geometry, Manufacturing, Particle size, Plates (structures)

Proceedings Papers

Post-CMP Cleaning Applications

V. Khosla, M. Vinogradov, N. V. Gitis, R. K. Singh, D. W. Stockbower, C. R. Wargo

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 719-720, October 20–22, 2008

Paper No: IJTC2008-71017

DOI: https://doi.org/10.1115/IJTC2008-71017

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Topics: Adhesion, Contamination, Ethanol, Particulate matter, Polishing, Semiconductor wafers, Stability, Surface roughness

Proceedings Papers

Derivation of Reynolds Equation in Cylindrical Coordinates Applicable to Pin-on-Disk and CMP

K. E. Beschorner, C. F. Higgs, III, M. R. Lovell

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 399-401, October 20–22, 2008

Paper No: IJTC2008-71245

DOI: https://doi.org/10.1115/IJTC2008-71245

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Topics: Disks, Pressure, Navier-Stokes equations, Polishing, Shapes, Tribology

Proceedings Papers

On the Effects of Surface Forces on the Contact of a Wafer and Abrasive Particles in CMP

Dinc¸er Bozkaya, Sinan Mu¨ftu¨

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 557-559, October 20–22, 2008

Paper No: IJTC2008-71122

DOI: https://doi.org/10.1115/IJTC2008-71122

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Topics: Dielectric materials, Fracture (Materials), Fracture (Process), Particulate matter, Polishing, Pressure, Semiconductor wafers

Proceedings Papers

A Model for Optimizing Material Removal Rate in Low-Pressure CMP: Effects of Pad Porosity and Abrasive Concentration

Dinc¸er Bozkaya, Sinan Mu¨ftu¨

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 569-571, October 20–22, 2008

Paper No: IJTC2008-71129

DOI: https://doi.org/10.1115/IJTC2008-71129

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Topics: Porosity, Pressure, Polishing, Dielectric materials, Semiconductor wafers

Proceedings Papers

The Variation of CMP Pad Asperity Friction as a Function of Speed and Normal Load

Joseph A. Levert, David Haas, Chad S. Korach, Nicholas Lakomcik, Edward Peters

Proc. ASME. IJTC2008, STLE/ASME 2008 International Joint Tribology Conference, 731-733, October 20–22, 2008

Paper No: IJTC2008-71217

DOI: https://doi.org/10.1115/IJTC2008-71217

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Topics: Friction, Stress, Polishing, Slurries, Damage, Deflection, Dielectric materials, Integrated circuits, Manufacturing, Thin films

Proceedings Papers

A Multi-Physics Particle-Augmented Mixed Lubrication Modeling Approach for Studying CMP

Elon Terrell, C. Fred Higgs, III

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 1017-1018, October 22–24, 2007

Paper No: IJTC2007-44487

DOI: https://doi.org/10.1115/IJTC2007-44487

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Topics: Lubrication, Modeling, Particulate matter, Physics, Algorithms, Contact mechanics, Fluid mechanics, Particle dynamics, Polishing, Wear

Proceedings Papers

The Effect of Microstructure on Chemical Mechanical Polishing Process of Thin-Film Metals

Joseph Bonivel, Sarah Biltz, Elon Terrell, Burak Ozdoganlar, C. Fred Higgs, III

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 1019-1020, October 22–24, 2007

Paper No: IJTC2007-44488

DOI: https://doi.org/10.1115/IJTC2007-44488

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Topics: Metals, Polishing, Thin films, Semiconductor wafers, Copper, Data storage systems, Integrated circuits, Manufacturing, Mechanical properties, Nanoindentation

Proceedings Papers

Chemical Mechanical Polishing Friction Measurements With Silica Atomic Force Microscope Tips

Joo Hoon Choi, Yangro Lee, Louis E. DeMarco, Richard T. Leveille, Joseph A. Levert, Chad S. Korach

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 749-751, October 22–24, 2007

Paper No: IJTC2007-44383

DOI: https://doi.org/10.1115/IJTC2007-44383

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Topics: Atomic force microscopy, Friction, Polishing, Particulate matter, Scanning probe microscopy, Circuits, Damage, Delamination, Glass, Integrated circuit fabrication

Proceedings Papers

Dynamics of the Formation of the Subambient Pressure Distribution During Chemical-Mechanical Polishing

A. Osorno, S. Tereshko, I. Yoon, S. Danyluk

Proc. ASME. IJTC2007, ASME/STLE 2007 International Joint Tribology Conference, Parts A and B, 1081-1082, October 22–24, 2007

Paper No: IJTC2007-44441

DOI: https://doi.org/10.1115/IJTC2007-44441

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Topics: Dynamics (Mechanics), Polishing, Pressure, Semiconductor wafers, Silicon, Particulate matter, Slurries, Electronics, Integrated circuits, Manufacturing

NARROW

Influence of Surface Roughness on Traction and Scuffing Performance of Lubricated Contacts for Aerospace and Automotive Gearing

Effect of Surface Microtexturing on Friction at Unidirectional Sliding Depending on Lubricant Viscosity

Development of the GranOO Discrete Element Platform for Dynamic Problems: Application for Tribological Application

On Polishing and Erosion of Aluminum Substrates by a Jet of Alumina Slurry

Effect of Surface Texturing on EHD Lubrication Films Under Transient Speed Condition

Studies on Friction and Transfer Layer Formation When Pure Magnesium Pins Slid at Various Numbers of Cycles on Steel Plates of Different Surface Texture

The Film Formation Mechanism of High Water-Based Emulsions

Axiomatic Design of a Multi-Directional Motion Pin on Disk Apparatus for Biotribology Study

A Multi-Physics Computational Framework to Predict Dishing and Erosion in Patterned Wafers

The Effect of Micro Dent Arrays Fabricated by Laser Shock Peening on Tribology

A Probabilistic Analysis of Third-Body Particle Embedment: Implications in Lapping of Magnetic Recording Heads

Post-CMP Cleaning Applications

Derivation of Reynolds Equation in Cylindrical Coordinates Applicable to Pin-on-Disk and CMP

On the Effects of Surface Forces on the Contact of a Wafer and Abrasive Particles in CMP

A Model for Optimizing Material Removal Rate in Low-Pressure CMP: Effects of Pad Porosity and Abrasive Concentration

The Variation of CMP Pad Asperity Friction as a Function of Speed and Normal Load

A Multi-Physics Particle-Augmented Mixed Lubrication Modeling Approach for Studying CMP

The Effect of Microstructure on Chemical Mechanical Polishing Process of Thin-Film Metals

Chemical Mechanical Polishing Friction Measurements With Silica Atomic Force Microscope Tips

Dynamics of the Formation of the Subambient Pressure Distribution During Chemical-Mechanical Polishing

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