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Proceedings Papers

Modeling and Analysis of Multiple Electrostatic Actuators on the Response of Vibrotactile Haptic Device

Santosh Mohan Rajkumar, Kumar Vikram Singh, Jeong-Hoi Koo
Proc. ASME. IMECE2022, Volume 1: Acoustics, Vibration, and Phononics, V001T01A004, October 30–November 3, 2022
Paper No: IMECE2022-96616
DOI: https://doi.org/10.1115/IMECE2022-96616
View Paper titled, Modeling and Analysis of Multiple Electrostatic Actuators on the Response of Vibrotactile Haptic Device
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Topics: Actuators, Electrostatic actuators, Excitation, Feedback, Haptics, Modeling, Simulation
Proceedings Papers

Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom

Jan E. Vandemeer, Michael S. Kranz, Gary K. Fedder
Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 113-118, November 16–21, 1997
Paper No: IMECE1997-0948
DOI: https://doi.org/10.1115/IMECE1997-0948
View Paper titled, Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
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Topics: Degrees of freedom, Microelectromechanical systems, Simulation, Design, Blocks (Building materials), Complex systems, Electrical properties, Electrostatic actuators, Signals
Proceedings Papers

Fatigue and Fracture Testing of Microelectromechanical Systems

Roberto Ballarini, Robert L. Mullen, Harold Kahn, Arthur H. Heuer
Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 151-152, November 15–20, 1998
Paper No: IMECE1998-1152
DOI: https://doi.org/10.1115/IMECE1998-1152
View Paper titled, Fatigue and Fracture Testing of Microelectromechanical Systems
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Topics: Fatigue, Fracture (Materials), Fracture (Process), Microelectromechanical systems, Testing, Bending strength, Crack propagation, Design, Dimensions, Electrostatic actuators
Proceedings Papers

Silicon Microrelays With Optimized Electrostatic Actuator

Joachim Schimkat
Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 175-180, November 14–19, 1999
Paper No: IMECE1999-0264
DOI: https://doi.org/10.1115/IMECE1999-0264
View Paper titled, Silicon Microrelays With Optimized Electrostatic Actuator
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Topics: Electrostatic actuators, Silicon, Design, Actuators, Degrees of freedom, Manganese (Metal), Shock (Mechanics), Simulation, Wedges
Proceedings Papers

On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation

Jerwei Hsieh, Chien-Cheng Chu, Weileun Fang
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 29-34, November 11–16, 2001
Paper No: IMECE2001/MEMS-23804
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23804
View Paper titled, On the Driving Mechanism Design for Large Amplitude Electrostatic Actuation
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Topics: Actuators, Design, Electrostatic actuators, Microelectromechanical systems, Vibration equipment
Proceedings Papers

Tunable Phase Grating Using CMOS Processes

Yu-Sheng Yang, Cheng-Hsien Liu, Bruce C. S. Chou
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 77-82, November 11–16, 2001
Paper No: IMECE2001/MEMS-23811
DOI: https://doi.org/10.1115/IMECE2001/MEMS-23811
View Paper titled, Tunable Phase Grating Using CMOS Processes
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Topics: Complementary metal oxide semiconductors, Diffraction gratings, Microelectromechanical systems, Design, Aluminum, Dry etching, Electrodes, Electrostatic actuators, Modeling, Reactive-ion etching
Proceedings Papers

Electrostatic Latch and Release: A Theoretical and Empirical Study

Gary J. O’Brien, David J. Monk, Liwei Lin
Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 19-26, November 5–10, 2000
Paper No: IMECE2000-1065
DOI: https://doi.org/10.1115/IMECE2000-1065
View Paper titled, Electrostatic Latch and Release: A Theoretical and Empirical Study
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Topics: Actuators, Cantilever beams, Cantilevers, Capacitance, Deflection, Displacement, Electric fields, Electrostatic actuators, Euler-Bernoulli beam theory, Microelectromechanical systems
Proceedings Papers

Demonstrating the Potential of a Novel Model to Improve Open-Loop Control of Electrostatic Comb-Drive Actuators in Electrolytes

Ohiremen Dibua, Vikram Mukundan, Beth Pruitt, Ali Mani, Gianluca Iaccarino
Proc. ASME. IMECE2017, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A022, November 3–9, 2017
Paper No: IMECE2017-71092
DOI: https://doi.org/10.1115/IMECE2017-71092
View Paper titled, Demonstrating the Potential of a Novel Model to Improve Open-Loop Control of Electrostatic Comb-Drive Actuators in Electrolytes
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Topics: Actuators, Electrolytes, Displacement, Circuits, Electrostatic actuators
Proceedings Papers

Dynamic Analysis of a Beam-Type Resonator With Off-Axis Attached Mass

Pezhman A. Hassanpour, Kamran Behdinan
Proc. ASME. IMECE2012, Volume 4: Dynamics, Control and Uncertainty, Parts A and B, 435-441, November 9–15, 2012
Paper No: IMECE2012-89473
DOI: https://doi.org/10.1115/IMECE2012-89473
View Paper titled, Dynamic Analysis of a Beam-Type Resonator With Off-Axis Attached Mass
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Topics: Bridges (Structures), Center of mass, Dynamic analysis, Electrostatic actuators, Energy harvesting, Equations of motion, Euler-Bernoulli beam theory, Excitation, Micromachining, Resonance
Proceedings Papers

Extremely Large Deflection Actuators for Translation or Rotation

Aarti Chigullapalli, Jason V. Clark
Proc. ASME. IMECE2012, Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 167-173, November 9–15, 2012
Paper No: IMECE2012-88096
DOI: https://doi.org/10.1115/IMECE2012-88096
View Paper titled, Extremely Large Deflection Actuators for Translation or Rotation
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Topics: Actuators, Deflection, Rotation, Microelectromechanical systems, Biomedical engineering, Breakdown (Electricity), Electrostatic actuators, Heat, Manufacturing, Microactuators
Proceedings Papers

MEMS Demodulator

So-Ra Chung, Sangtak Park, Eihab M. Abdel-Rahman, John Yeow, Mahmoud Khater
Proc. ASME. IMECE2012, Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B, 387-391, November 9–15, 2012
Paper No: IMECE2012-87968
DOI: https://doi.org/10.1115/IMECE2012-87968
View Paper titled, MEMS Demodulator
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Topics: Microelectromechanical systems, Electrostatic actuators, Signals, Displacement, Electrical properties, Filters, Modeling, Noise (Sound), Physics, Plates (structures)
Proceedings Papers

Design of Radio Frequency (RF) MEMS Switches: Modeling

Yong Zhu, Horacio D. Espinosa
Proc. ASME. IMECE2003, Microelectromechanical Systems, 265-270, November 15–21, 2003
Paper No: IMECE2003-41945
DOI: https://doi.org/10.1115/IMECE2003-41945
View Paper titled, Design of Radio Frequency (RF) MEMS Switches: Modeling
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Topics: Design, Microelectromechanical systems, Modeling, Switches, Deflection, Finite element model, Electrostatic actuators, Geometry, Optimization, Reliability
Proceedings Papers

Scribe-and-Break for Post Release MEMS Die Separation

Thomas W. Wallner, Andrew D. Oliver, Paul L. Bergstrom
Proc. ASME. IMECE2004, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 329-335, November 13–19, 2004
Paper No: IMECE2004-61667
DOI: https://doi.org/10.1115/IMECE2004-61667
View Paper titled, Scribe-and-Break for Post Release MEMS Die Separation
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Topics: Microelectromechanical systems, Separation (Technology), Fracture (Materials), Diamonds, Electrostatic actuators, Experimental design, Glass, Optimization, Polysilicon, Silicon
Proceedings Papers

A Micro-Focusing Stage Applied to Optical Pick-Up Head

Chia-Wen Lee, Chung-Feng Lai, Weileun Fang
Proc. ASME. IMECE2004, Microelectromechanical Systems, 143-144, November 13–19, 2004
Paper No: IMECE2004-59767
DOI: https://doi.org/10.1115/IMECE2004-59767
View Paper titled, A Micro-Focusing Stage Applied to Optical Pick-Up Head
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Topics: Actuators, Design, Disks, Electrodes, Electrostatic actuators, Laser beams, Lenses (Optics), Micromachining, Pistons, Self-assembly
Proceedings Papers

Mechanical Brakes for Electrostatic Actuators

John D. Grade, Kevin Y. Yasumura, Hal Jerman
Proc. ASME. IMECE2004, Microelectromechanical Systems, 189-195, November 13–19, 2004
Paper No: IMECE2004-60788
DOI: https://doi.org/10.1115/IMECE2004-60788
View Paper titled, Mechanical Brakes for Electrostatic Actuators
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Topics: Brakes, Electrostatic actuators, Actuators, Deflection, Braking, Engines, Failure, Motors, Pins (Engineering), Resonance