We present closed-form solutions for stresses in a thin film resulting from a purely dilatational stress-free strain that can vary arbitrarily within the film. The solutions are specific to a two-dimensional thin film on a thick substrate geometry and are presented for both a welded and a perfectly slipping film/substrate interface. Variation of the stress-free strain through the thickness of the film is considered to be either arbitrary or represented by a Fourier integral, and solutions are presented in the form of a Fourier series in the lateral dimension x. The Fourier coefficients can be calculated rapidly using Fast Fourier Transforms. The method is applied to determine the stresses in the film and substrate for three cases: (a) where the stress-free strain is a sinusoidal modulation in x, (b) where the stress-free strain varies only through the thickness, and (c) where a rectangular inclusion is embedded within the film, and the calculated stresses match accurately with the exact solutions for these cases.

1.
Timoshenko, S. P., and Goodier, J. N., 1970, Theory of Elasticity, McGraw-Hill, New York.
2.
Larche
,
F.
, and
Cahn
,
J. W.
,
1985
, “
The Interactions of Composition and Stress in Crystalline Solids
,”
Acta Metall.
,
33
, pp.
333
357
.
3.
Downes
,
J. R.
, and
Faux
,
D. A.
,
1997
, “
The Fourier-Series Method for Calculating Strain Distributions in Two Dimensions
,”
J. Phys.: Condens. Matter
,
9
, pp.
4509
4520
.
4.
Pickett
,
G.
,
1944
, “
Application of the Fourier Method to the Solution of Certain Boundary Problems in the Theory of Elasticity
,”
ASME J. Appl. Mech.
,
66
, pp.
176
182
.
5.
Faux
,
D. A.
,
1994
, “
The Fourier-Series Method for the Calculation of Strain Relaxation in Strained-Layer Structures
,”
J. Appl. Phys.
,
75
, pp.
186
192
.
6.
Faux
,
D. A.
, and
Haigh
,
J.
,
1990
, “
Calculation of Strain Distributions at the Edge of Strained-Layer Structures
,”
J. Phys.: Condens. Matter
,
2
, pp.
289
10
.
7.
Glas
,
F.
,
1987
, “
Elastic State and Thermodynamical Properties of Inhomogeneous Epitaxial Layers: Application to Immiscible III–V Alloys
,”
J. Appl. Phys.
,
62
, pp.
3201
3208
.
8.
Glas
,
F.
,
1991
, “
Coherent Stress Relaxation in a Half Space: Modulated Layers, Inclusions, Steps and a General Solution
,”
J. Appl. Phys.
,
70
, pp.
3556
3571
.
9.
Fan
,
Q. H.
,
Fernandes
,
A.
, and
Periera
,
E.
,
1998
, “
Stress-Relief Behavior in Chemical-Vapor-Deposited Diamond Films
,”
J. Appl. Phys.
,
84
, pp.
3155
3158
.
10.
Dankov
,
P. D.
, and
Churaev
,
P. V.
,
1950
,
Dokl. Akad. Nauk SSSR
,
29
, pp.
529
582
.
11.
Hou
,
P. Y.
, and
Cannon
,
R. M.
,
1997
, “
The Stress State in Thermally Grown NiO Scales
,”
Mater. Sci. Forum
,
251–254
, pp.
325
332
.
12.
Eshelby
,
J. D.
,
1957
, “
The Determination of the Elastic Field of an Ellipsoidal Inclusion, and Related Problems
,”
Proc. R. Soc. London, Ser. A
,
241
, pp.
376
396
.
13.
Head
,
A. K.
,
1953
, “
Edge Dislocations in Inhomogeneous Media
,”
Proc. R. Soc. London, Ser. B
,
66
, pp.
793
801
.
14.
Malvern, L. E., 1969, Introduction to the Mechanics of a Continuous Medium, Prentice-Hall, Englewood Cliffs, NJ.
15.
Hu
,
S. M.
,
1989
, “
Stress From a Parallelepipedic Thermal Inclusion in a Semispace
,”
J. Appl. Phys.
,
66
, pp.
2741
2743
.
16.
Hu
,
S. M.
,
1989
, “
Stress From Isolation Trenches in Silicon Substrates
,”
J. Appl. Phys.
,
67
, pp.
1092
1101
.
17.
Churchill, R. V., 1963, Fourier Series and Boundary Value Problems, McGraw-Hill, New York.
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