Pressure Drops of Water Flow Through Micromachined Particle Filters

[+] Author and Article Information
Tzung K. Hsiai

Department of Biomedical Engineering and Division of Cardiovascular Medicine, School of Engineering and Keck School of Medicine, Los Angeles, CA 90089-1451

Sung Kwon Cho, Joon Mo Yang, Chih-Ming Ho

Mechanical and Aerospace Engineering Department, University of California, Los Angeles, CA 90095

Xing Yang, Yu-Chong Tai

Department of Electrical Engineering, California Institute of Technology, Pasadena, CA 91125

J. Fluids Eng 124(4), 1053-1056 (Dec 04, 2002) (4 pages) doi:10.1115/1.1514209 History: Received October 19, 2000; Revised May 16, 2002; Online December 04, 2002
Copyright © 2002 by ASME
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Grahic Jump Location
Fabricated MEMS Filters with circular holes and thickness of 3 μm: (a) photographs of the MEMS Filter (b) geometric factors in the MEMS Filter (not to scale) (c) side-wall profiles and SEM pictures of the filtering hole
Grahic Jump Location
(a) Image of the MEMS filtering holes by WYKO surface profiler and (b) probability density function of the hole size for MEMS Filter I (see Table 1)
Grahic Jump Location
The measured pressure drop of MEMS filters in comparison with nondimensionalized numerical formula (Eq. (1)). (Uncertainty in Kβ2/(3.5t/D+3)±6.6% and in ReD±3.3%).



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