Displacement measurement in atomic force microscopy (AFM) is most commonly obtained indirectly by measuring the slope of the AFM probe and applying a calibration factor. Static calibration techniques operate on the assumption that the probe response approximates single mode behavior. For off-resonance excitation or different operating conditions the contribution of higher modes may become significant. In this paper, changes to the calibrated slope-displacement relationship and the corresponding implications on measurement accuracy are investigated. A model is developed and numerical simulations are performed to examine the effect of laser spot position, tip mass, quality factor and excitation frequency on measurement accuracy. Free response conditions and operation under nonlinear tip-sample forces are considered. Results are verified experimentally using a representative macroscale system. A laser spot positioned at a nominal position between x = 0.5 and 0.6 is determined to minimize optical lever measurement error under conditions where the response is dominated by contributions from the first two modes, due to excitation as well as other factors.
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e-mail: parker.eason@rice.edu
e-mail: andrew.j.dick@rice.edu
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January 2012
Research Papers
Response Measurement Accuracy for Off-Resonance Excitation in Atomic Force Microscopy
R. Parker Eason,
e-mail: parker.eason@rice.edu
R. Parker Eason
Nonlinear Phenomena Laboratory, Dept. of Mechanical Engineering and Materials Science, Rice University
, Houston, TX
77005
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Andrew J. Dick
e-mail: andrew.j.dick@rice.edu
Andrew J. Dick
Nonlinear Phenomena Laboratory, Dept. of Mechanical Engineering and Materials Science, Rice University
, Houston, TX
77005
Search for other works by this author on:
R. Parker Eason
Nonlinear Phenomena Laboratory, Dept. of Mechanical Engineering and Materials Science, Rice University
, Houston, TX
77005e-mail: parker.eason@rice.edu
Andrew J. Dick
Nonlinear Phenomena Laboratory, Dept. of Mechanical Engineering and Materials Science, Rice University
, Houston, TX
77005e-mail: andrew.j.dick@rice.edu
J. Dyn. Sys., Meas., Control. Jan 2012, 134(1): 011010 (9 pages)
Published Online: December 5, 2011
Article history
Received:
January 5, 2011
Revised:
September 17, 2011
Accepted:
September 21, 2011
Online:
December 5, 2011
Published:
December 5, 2011
Citation
Parker Eason, R., and Dick, A. J. (December 5, 2011). "Response Measurement Accuracy for Off-Resonance Excitation in Atomic Force Microscopy." ASME. J. Dyn. Sys., Meas., Control. January 2012; 134(1): 011010. https://doi.org/10.1115/1.4005361
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