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Keywords: surface topography
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Dyn. Sys., Meas., Control. May 2008, 130(3): 031008.
Published Online: April 25, 2008
.... The controller is experimentally implemented on a three-dimensional nanopositioning stage for surface topography tracking, a problem typically encountered in scanning probe microscopy applications. After hitting an internal turning point, its associated minor hysteresis loop is no longer useful...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 2000, 122(1): 71–77.
Published Online: July 9, 1998
... OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL . Manuscript received by the Dynamic Systems and Control Division July 9, 1998. Associate Technical Editor: T. R. Kurfess. 09 July 1998 manufacturing processes control systems surface topography distributed parameter systems welding mass...