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Keywords: X-ray photoelectron spectra
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Journal Articles
Journal:
Journal of Electronic Packaging
Publisher: ASME
Article Type: Technical Papers
J. Electron. Packag. December 2002, 124(4): 362–366.
Published Online: December 12, 2002
... films permittivity surface topography atomic force microscopy surface chemistry X-ray photoelectron spectra integrated circuit technology As polymer dielectric materials appear to be the immediate successor to oxide interlevel dielectrics (ILDs), industry and academia have begun...
