... films permittivity surface topography atomic force microscopy surface chemistry X-ray photoelectron spectra integrated circuit technology As polymer dielectric materials appear to be the immediate successor to oxide interlevel dielectrics (ILDs), industry and academia have begun...

...E. Suhir,, Editor reliability packaging integrated circuit technology integrated optics micromechanical devices micro-optics Knowledge at the intersection of reliability, mechanical, materials, chemical, electrical, optical, manufacturing and software engineering holds the key...

... received by the EEPD August 9, 1999; revised manuscript received April 13, 2000. Associated Technical Editor: B. Michel. 09 August 1999 integrated circuit technology thermal stress cracking crack-edge stress field analysis thermoelasticity temperature distribution stress relaxation...