Numerical analysis of laser chemical vapor deposition (LCVD) of titanium nitride by a moving laser beam is presented. The effect of natural convection due to temperature and concentration differences in the gaseous mixture is modeled and implemented into thermal model of LCVD by a moving laser beam. The problem is formulated in a coordinate system that moves with the laser beam and therefore, the problem is a quasi-steady state problem. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with a laser power of 300 W but becomes important when the laser power is increased to 360 W.
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