A numerical simulation study was carried out to shed light on the effects of applied crucible rotation and static magnetic field during the traveling heater method growth of bulk SiGe single crystals. The simulation results show that the application of crucible rotation weakens the radial silicon concentration gradient due to the effect of centrifugal force. The effects of applied static magnetic field direction and strength on the concentration field in the melt were also studied. It was found that the simultaneous application of crucible rotation and static magnetic field is best to grow large crystals with uniform composition. An optimum combination of crucible rotation rates and applied magnetic field strengths is determined.
Issue Section:
Melting and Solidification
Keywords:
convection,
crystal growth from melt,
flow simulation,
Ge-Si alloys,
magnetohydrodynamics,
numerical analysis,
rotational flow,
semiconductor growth,
semiconductor materials,
zone melting,
numerical simulation,
crystal growth,
traveling heater method,
crucible rotation,
static magnetic field
References
1.
Pi
, X.
, Holman
, Z.
, and Kortshagen
, U.
, 2010, “Silicon and Germanium Nanocrystal Inks for Low-Cost Solar Cells
,” ASME Conference Proceedings ES2010
, pp. 471
–474
.2.
Sun
, L.
, and Murthy
, J. Y.
, 2010, “Molecular Dynamics Simulation of Phonon Scattering at Silicon/Germanium Interfaces
,” ASME J. Heat Transfer
, 132
, p. 102403
. 3.
Abbasoglu
, S.
, and Sezai
, I.
, 2007, “Three-Dimensional Modeling of Melt Flow and Segregation During Czochralski Growth of GexSi1-x Single Crystals
,” Int. J. Ther. Sci.
, 46
, pp. 561
–572
. 4.
Lent
, B.
, Dost
, S.
, Redden
, R. F.
, and Liu
, Y.
, 2002, “Mathematical Simulation of the Travelling Heater Method Growth of Ternary Semiconductor Materials Under Suppressed Gravity Conditions
,” J. Crystal Growth
, 237–239
, pp. 1876
–1880
. 5.
Kumar
, V.
, Dost
, S.
, and Durst
, F.
, 2007, “Numerical Modeling of Crystal Growth Under Strong Magnetic Fields: An Application to the Travelling Heater Method
,” App. Math. Model.
, 31
, pp. 589
–605
. 6.
Jaber
, T. J.
, Saghir
, M. Z.
, and Viviani
, A.
, 2009, “Three-Dimensional Modeling of GeSi Growth in Presence of Axial and Rotating Magnetic Fields
,” Eur. J. Mech. B/Fluids
, 28
, pp. 214
–223
. 7.
Sadrhosseini
, H.
, and Sezai
, I.
, 2009, “Control of Dopant Segregation During Crystallization of Semiconductors by Travelling Heater Method Using Magnetic Fields
,” Proceedings of the 20th International Symposium Transport Phenomena
, N.
Djilali
and P. C.
Sui
, eds. Paper No. 185.8.
Martinez-Tomas
, M. C.
, Munoz-Sanjose
, V.
, and Reig
, C.
, 2002, “A Numerical Study of Thermal Condition in the THM Growth of HgTe
,” J. Crystal Growth
, 243
, pp. 463
–475
. 9.
Adachi
, S.
, Ogawa
, Y.
, Koshikawa
, N.
, Matsumoto
, S.
, Kinoshita
, K.
, Yoshizaki
, I.
, Tsuru
, T.
, Miyata
, H.
, Takayanagi
, M.
, and Yoda
, S.
, 2005, “Homogeneous SiGe Crystals Grown by Using the Travelling Liquids-Zone Method
,” J. Crystal Growth
, 280
, pp. 372
–377
. 10.
Dost
, S.
, and Okano
, Y.
, eds., 2007, Crystal Growth Under Applied Fields
, Transworld Research Network
, Kerala, India
, pp. 193
–214
.11.
Lan
, C. W.
, and Chian
, J. H.
, 1999, “Effects of Ampoule Rotation on Vertical Zone-Melting Crystal Growth: Steady Rotation Versus Accelerated Crucible Rotation Technique (ACRT)
,” J. Crystal Growth
, 203
, pp. 286
–296
. 12.
Lan
, C. W.
, Liang
, M. C.
, and Chian
, C. H.
, 2000, “Suppressing Three-Dimensional Unsteady Flows in Vertical Zone-Melting by Steady Ampoule Rotation
,” J. Crystal Growth
, 213
, pp. 395
–407
. 13.
Lan
, C. W.
, 2000, “Effects of Axial Vibration on Vertical Zone-Melting Processing
,” Int. J. Heat Mass Transfer
, 43
, pp. 1987
–1997
. 14.
Liu
, Y. C.
, Okano
, Y.
, and Dost
, S.
, 2002, “The Effect of Applied Magnetic Field on Flow Structure in Liquid Phase Electroepitaxy—A Three Dimensional Simulation Model
,” J. Crystal Growth
, 244
, pp. 12
–16
. 15.
Jaber
, T. J.
, Labrie
, D.
, and Saghir
, M. Z.
, 2008, “Ge0.98Si0.02 Crystal Grown by the Travelling Heating Method Using Axial Magnetic Field and Rotating Crucible
,” Int. J. Mater. Prod. Technol.
, 32
, pp. 56
–70
. 16.
Inatomi
, Y.
, 2006, “Buoyancy Convection in Cylindrical Conductive Melt With Low Grashof Number Under Uniform Static Magnetic Field
,” Int. J. Heat Mass Transfer
, 49
, pp. 4821
–4830
. 17.
Yildiz
, E.
, Dost
, S.
, and Yildiz
, M.
, 2006, “A Numerical Simulation Study for the Effect of Magnetic Fields in Liquid Phase Diffusion Growth of SiGe Single Crystals
,” J. Crystal Growth
, 291
, pp. 497
–511
. 18.
Lan
, C. W.
, and Liang
, M. C.
, 2000, “Three-Dimensional Simulation of Vertical Zone-Melting Crystal Growth: Symmetry Breaking to Multiple States
,” J. Crystal Growth
, 208
, pp. 327
–340
. 19.
Baumgartl
, J.
, Budweiser
, W.
, Muller
, G.
, and Neumann
, G.
, 1989, “Studies of Buoyancy Driven Convection in a Vertical Cylinder With Parabolic Temperature Profile
,” J. Crystal Growth
, 97
, pp. 9
–17
. Copyright © 2012
by American Society of Mechanical Engineers
You do not currently have access to this content.