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Keywords: semiconductor device manufacture
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2011, 133(3): 031006.
Published Online: June 8, 2011
... semiconductor device manufacture surface roughness Wafers made of materials such as silicon, III-V and II-VI compounds, and optoelectronic materials, require a high-degree of surface quality in order to increase the yield in micro-electronics fabrication to produce integrated circuits and devices. Due...
