Piezoelectric heterogeneous bimorphs have extensive applications in the MEMS area. In order to formulate their displacement distribution more conveniently, a concise analytical solution is described herein. This solution integrates all of the important influence factors, such as geometry and material properties, into a single expression. Secondary effects such as shear, residual stress induced curvature, and electrostiction, are not considered, but they are found to be minimally important based on the accuracy of the predicted results. The expression is verified using the finite element method, and shown to be straightforward compared to the more complicated couple-field FEM analysis for a specific range of materials and thicknesses. The method is subsequently shown to be capable of quickly estimating the displacement in a bimorph beam, making it a useful tool for designing piezoelectric structures.
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July 2004
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A Study of Displacement Distribution in a Piezoelectric Heterogeneous Bimorph
Qiang Li,,
Qiang Li,
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
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Michael Lovell,,
Michael Lovell,
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
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Junfeng Mei, and,
Junfeng Mei, and
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
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William Clark
William Clark
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
Search for other works by this author on:
Qiang Li,
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
Michael Lovell,
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
Junfeng Mei, and
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
William Clark
Department of Mechanical Engineering, University of Pittsburgh, Pittsburgh, PA 15261
Contributed by the Mechanisms and Robotics Committee for publication in the JOURNAL OF MECHANICAL DESIGN. Manuscript received June 2003; revised January 2004. Associate Editor: S. Anantha Suresh.
J. Mech. Des. Jul 2004, 126(4): 757-762 (6 pages)
Published Online: August 12, 2004
Article history
Received:
June 1, 2003
Revised:
January 1, 2004
Online:
August 12, 2004
Citation
Li, , Q., Lovell, , M., Mei, and , J., and Clark , W. (August 12, 2004). "A Study of Displacement Distribution in a Piezoelectric Heterogeneous Bimorph ." ASME. J. Mech. Des. July 2004; 126(4): 757–762. https://doi.org/10.1115/1.1759362
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