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Keywords: micromirrors
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Mech. Des. October 2007, 129(10): 1023–1030.
Published Online: December 15, 2006
...Faik Can Meral; Ipek Basdogan Future optical microsystems, such as microelectromechanical system (MEMS) scanners and micromirrors, will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various...