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Journal Articles

Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes

Huimin Zhou, Yingchun Jiang, Christopher M. Dmuchowski, Changhong Ke, Jia Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2022, 10(1): 011001.
Paper No: JMNM-21-1055
https://doi.org/10.1115/1.4054316
Published Online: April 28, 2022
View Article titled, Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes
Open the PDF for Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes in another window
Topics: Atomic force microscopy, Electric fields, Lithography, Nanolithography, Probes, Resolution (Optics), Stiffness, Polymer films, Polymers, Fundamental forces (Physics)
Includes: Supplementary data