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Keywords: contact mode
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2022, 10(1): 011001.
Paper No: JMNM-21-1055
Published Online: April 28, 2022
... coatings to make patterns with little probe–sample interaction, which thereby avoids the tip wear that is a major issue for contact-mode AFM-based lithography, which usually requires a high probe–sample contact force to fabricate nanopatterns; however, the relatively large tip radius and large tip-sample...
Topics:
Atomic force microscopy,
Electric fields,
Lithography,
Nanolithography,
Probes,
Resolution (Optics),
Stiffness,
Polymer films,
Polymers,
Fundamental forces (Physics)
Includes: Supplementary data