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Noboru Morita
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Proceedings Papers

Measurement and Evaluation of the Static Friction Coefficient Between Fixed Coupling Surfaces Under Face Contact and High Contact Pressure

Fumihiko Inagaki, Noboru Morita, Hirofumi Hidai, Souta Matsusaka, Tatsuo Ohmori, Akira Chiba, Yuichiro Matsumoto, Shinji Shimizu
Proc. ASME. LEMP2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, V001T08A006, September 3, 2020
Publisher: American Society of Mechanical Engineers
Paper No: LEMP2020-8530
https://doi.org/10.1115/LEMP2020-8530
View Paper titled, Measurement and Evaluation of the Static Friction Coefficient Between Fixed Coupling Surfaces Under Face Contact and High Contact Pressure
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Topics: Pressure, Stiction, Grinding, Surface roughness, Sliding friction, Steel, Stiffness
Journal Articles

Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip

Noritaka Kawasegi, Noboru Takano, Daisuke Oka, Noboru Morita, Shigeru Yamada, Kazutaka Kanda, Shigeto Takano, Tsutomu Obata, Kiwamu Ashida
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. August 2006, 128(3): 723–729.
https://doi.org/10.1115/1.2163364
Published Online: November 23, 2005
View Article titled, Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip
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Topics: Atomic force microscopy, Cantilevers, Diamonds, Machining, Silicon, Crystals, Wear resistance, Chemical vapor deposition, Photolithography, Cutting
Journal Articles

Mechanical Approach to Nanomachining of Silicon Using Oxide Characteristics Based on Tribo Nanolithography (TNL) in KOH Solution

Jeong Woo Park, Noritaka Kawasegi, Noboru Morita, Deug Woo Lee
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 801–806.
https://doi.org/10.1115/1.1811114
Published Online: February 4, 2005
View Article titled, Mechanical Approach to Nanomachining of Silicon Using Oxide Characteristics Based on Tribo Nanolithography (TNL) in KOH Solution
Open the PDF for Mechanical Approach to Nanomachining of Silicon Using Oxide Characteristics Based on Tribo Nanolithography (TNL) in KOH Solution in another window
Topics: Atomic force microscopy, Diamonds, Etching, Nanolithography, Silicon, Cantilevers, Corrosion resistance