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Proceedings Papers

The Effect of Membrane Load on the Usage of Berger’s Model in Electrostatically Actuated Pre-Stressed Circular Curved Micro Plates

Lior Medina, Rami Eliasi, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A008, August 17–19, 2021
Publisher: American Society of Mechanical Engineers
Paper No: DETC2021-69404
https://doi.org/10.1115/DETC2021-69404
View Paper titled, The Effect of Membrane Load on the Usage of Berger’s Model in Electrostatically Actuated Pre-Stressed Circular Curved Micro Plates
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Topics: Membranes, Microplates, Stress, Buckling, Degrees of freedom, Finite element analysis, Reliability
Proceedings Papers

Bow Actuator: Low Voltage Switching in Electrostatically Actuated Bistable Beams

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A009, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-85534
https://doi.org/10.1115/DETC2018-85534
View Paper titled, Bow Actuator: Low Voltage Switching in Electrostatically Actuated Bistable Beams
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Topics: Actuators, Electrodes
Proceedings Papers

Sub g Threshold Acceleration Sensor Incorporating Latched Bistable Beam

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A007, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-85181
https://doi.org/10.1115/DETC2018-85181
View Paper titled, Sub g Threshold Acceleration Sensor Incorporating Latched Bistable Beam
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Topics: Design, Dimensions, Microsensors, Sensors, Stiffness, Switches
Journal Articles

Actuation of Higher Harmonics in Large Arrays of Micromechanical Cantilevers for Expanded Resonant Peak Separation

Nir Dick, Scott Grutzik, Christopher B. Wallin, B. Robert Ilic, Slava Krylov, Alan T. Zehnder
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. October 2018, 140(5): 051013.
Paper No: VIB-17-1498
https://doi.org/10.1115/1.4039568
Published Online: April 26, 2018
View Article titled, Actuation of Higher Harmonics in Large Arrays of Micromechanical Cantilevers for Expanded Resonant Peak Separation
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Topics: Cantilevers, Resonance, Stiffness, Separation (Technology), Finite element model, Finite element analysis, Dynamics (Mechanics), Modal analysis
Proceedings Papers

On the Usage of Berger’s Model for Electrostatically Actuated Circular Curved Micro Plates

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A006, August 6–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: DETC2017-67523
https://doi.org/10.1115/DETC2017-67523
View Paper titled, On the Usage of Berger’s Model for Electrostatically Actuated Circular Curved Micro Plates
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Topics: Algorithms, Approximation, Buckling, Deflection, Displacement, Equilibrium (Physics), Finite element analysis, Flat plates, Microelectromechanical systems, Microplates
Journal Articles

Special Section on the Dynamics of MEMS and NEMS

Jeffrey F. Rhoads, Hanna Cho, John Judge, Slava Krylov, Steven W. Shaw, Mohammad Younis
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Guest Editorial
J. Vib. Acoust. August 2017, 139(4): 040301.
Paper No: VIB-17-1190
https://doi.org/10.1115/1.4036699
Published Online: May 30, 2017
View Article titled, Special Section on the Dynamics of MEMS and NEMS
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Topics: Dynamics of MEMS, Electromechanical systems, Mechatronics, Nanoelectromechanical systems
Journal Articles

Bistable Cantilevers Actuated by Fringing Electrostatic Fields

Naftaly Krakover, Slava Krylov
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2017, 139(4): 040908.
Paper No: VIB-16-1598
https://doi.org/10.1115/1.4036625
Published Online: May 30, 2017
View Article titled, Bistable Cantilevers Actuated by Fringing Electrostatic Fields
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Topics: Cantilevers, Deflection, Electric fields, Electrodes, Sensors, Stress, Equilibrium (Physics)
Proceedings Papers

Limit Points Behavior in Electrostatically Actuated Initially Curved Micro Plate

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2016, Volume 4: 21st Design for Manufacturing and the Life Cycle Conference; 10th International Conference on Micro- and Nanosystems, V004T08A005, August 21–24, 2016
Publisher: American Society of Mechanical Engineers
Paper No: DETC2016-59457
https://doi.org/10.1115/DETC2016-59457
View Paper titled, Limit Points Behavior in Electrostatically Actuated Initially Curved Micro Plate
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Topics: Microplates, Stress, Displacement, Buckling, Degrees of freedom, Dimensions, Equilibrium (Physics), Finite element analysis, Flat plates, Plates (structures)
Proceedings Papers

Latching Criteria in Bistable Prestressed Curved Micro Beams

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2015, Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems, V004T09A010, August 2–5, 2015
Publisher: American Society of Mechanical Engineers
Paper No: DETC2015-47036
https://doi.org/10.1115/DETC2015-47036
View Paper titled, Latching Criteria in Bistable Prestressed Curved Micro Beams
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Topics: Bifurcation, Buckling, Microbeams, Numerical analysis, Stress
Proceedings Papers

Toward MEMS Displacement Sensor Based on Resonant Frequency Monitoring of Slightly Curved Beams

Naftaly Krakover, Bojan R. Ilic, Slava Krylov
Proc. ASME. IDETC-CIE2015, Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems, V004T09A006, August 2–5, 2015
Publisher: American Society of Mechanical Engineers
Paper No: DETC2015-46308
https://doi.org/10.1115/DETC2015-46308
View Paper titled, Toward MEMS Displacement Sensor Based on Resonant Frequency Monitoring of Slightly Curved Beams
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Topics: Displacement, Microelectromechanical systems, Resonance, Sensors, Buckling, Design, Electrodes, Crystals, Lasers, Microbeams
Proceedings Papers

Dynamic Trapping in Bi-Stable Electrostatically Actuated Curved Micro Beams

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A008, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34880
https://doi.org/10.1115/DETC2014-34880
View Paper titled, Dynamic Trapping in Bi-Stable Electrostatically Actuated Curved Micro Beams
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Topics: Microbeams, Dynamics (Mechanics), Electrodes, Stress, Structural elements (Construction), Transients (Dynamics)
Proceedings Papers

Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields

Slava Krylov, Stella Lulinsky, Bojan R. Ilic, Inbar Schneider
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A009, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34904
https://doi.org/10.1115/DETC2014-34904
View Paper titled, Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields
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Topics: Dynamics (Mechanics), Electric fields, Microcantilevers, Silicon-on-insulator, Computer simulation, Degrees of freedom, Excitation, Finite element analysis, Manufacturing, Semiconductor wafers
Journal Articles

Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing

Avinoam Rabinovich, Assaf Ya'akobovitz, Slava Krylov
Journal: Journal of Vibration and Acoustics
Publisher: ASME
Article Type: Research-Article
J. Vib. Acoust. August 2014, 136(4): 041013.
Paper No: VIB-13-1346
https://doi.org/10.1115/1.4027559
Published Online: May 28, 2014
View Article titled, Fringing Electrostatic Field Actuation of Microplates for Open Air Environment Sensing
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Topics: Boundary-value problems, Damping, Manufacturing, Microplates, Plates (structures), Pressure, Resonance, Vibration, Silicon, Simulation
Proceedings Papers

Symmetry Breaking in an Initially Curved Micro Beam Loaded by a Distributed Electrostatic Force

Lior Medina, Rivka Gilat, Slava Krylov
Proc. ASME. IDETC-CIE2012, Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference, 57-66, August 12–15, 2012
Publisher: American Society of Mechanical Engineers
Paper No: DETC2012-70158
https://doi.org/10.1115/DETC2012-70158
View Paper titled, Symmetry Breaking in an Initially Curved Micro Beam Loaded by a Distributed Electrostatic Force
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Topics: Microbeams, Buckling, Bifurcation, Deflection, Degrees of freedom, Numerical analysis, Stress
Proceedings Papers

Two-Directional Switching of Bistable Curved Micro Beams by Fringing Electrostatic Fields

Slava Krylov, Bojan R. Ilic, S. Lulinsky
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 209-218, August 28–31, 2011
Publisher: American Society of Mechanical Engineers
Paper No: DETC2011-48544
https://doi.org/10.1115/DETC2011-48544
View Paper titled, Two-Directional Switching of Bistable Curved Micro Beams by Fringing Electrostatic Fields
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Topics: Electric fields, Microbeams, Deflection, Differential equations, Electrodes, Fittings, Static stability
Proceedings Papers

Bistable Threshold Sensor With Mechanically Nonlinear Self-Limiting Suspension and Electrostatic Actuation

Shila Rabanim, Emil Amir, Slava Krylov
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 135-144, August 28–31, 2011
Publisher: American Society of Mechanical Engineers
Paper No: DETC2011-47575
https://doi.org/10.1115/DETC2011-47575
View Paper titled, Bistable Threshold Sensor With Mechanically Nonlinear Self-Limiting Suspension and Electrostatic Actuation
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Topics: Sensors, Silicon-on-insulator, Displacement, Manufacturing, Modeling, Reactive-ion etching, Reliability, Resolution (Optics), Stiffness, Transducers
Proceedings Papers

Parametric Excitation of Flexural Vibrations of Micro Beams by Fringing Electrostatic Fields

Slava Krylov, Nicola Molinazzi, Tsvi Shmilovich, Uri Pomerantz, Stella Lulinsky
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 601-611, August 15–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: DETC2010-28684
https://doi.org/10.1115/DETC2010-28684
View Paper titled, Parametric Excitation of Flexural Vibrations of Micro Beams by Fringing Electrostatic Fields
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Topics: Electric fields, Excitation, Microbeams, Vibration, Electrodes, Silicon-on-insulator, Stiffness, Actuators, Deflection, Fittings
Proceedings Papers

Kinematically Excited Large Angle Tilting Actuator

Assaf Ya’akobovitz, Slava Krylov
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 555-560, August 15–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: DETC2010-28454
https://doi.org/10.1115/DETC2010-28454
View Paper titled, Kinematically Excited Large Angle Tilting Actuator
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Topics: Actuators, Manufacturing, Microactuators, Reactive-ion etching, Semiconductor wafers, Silicon-on-insulator, Transducers
Proceedings Papers

Pull-In Dynamics of Electrostatically Actuated Bistable Micro Beam

Slava Krylov, Nir Dick
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 635-645, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87236
https://doi.org/10.1115/DETC2009-87236
View Paper titled, Pull-In Dynamics of Electrostatically Actuated Bistable Micro Beam
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Topics: Dynamics (Mechanics), Microbeams, Deflection, Arches, Damping, Electric fields, Sensors, Simulation results, Switches, Transients (Dynamics)
Proceedings Papers

Electromagnetic Microactuators With On-Chip Resin-Bonded Permanent Magnets

David Schreiber, Slava Krylov, Yosi Shacham-Diamand, Timur Sibgatullin
Proc. ASME. ESDA2008, Volume 4: Fatigue and Fracture; Fluids Engineering; Heat Transfer; Mechatronics; Micro and Nano Technology; Optical Engineering; Robotics; Systems Engineering; Industrial Applications, 319-325, July 7–9, 2008
Publisher: American Society of Mechanical Engineers
Paper No: ESDA2008-59304
https://doi.org/10.1115/ESDA2008-59304
View Paper titled, Electromagnetic Microactuators With On-Chip Resin-Bonded Permanent Magnets
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Topics: Microactuators, Permanent magnets, Resins, Magnets, Silicon-on-insulator, Semiconductor wafers, Resonance, Crystals, Heating, Joules