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Proceedings Papers

Design and Fabrication of Micro Photonic Sensors for Manufacturing

Xugang Zhang, Xiaochun Li
Proc. ASME. MSEC2007, ASME 2007 International Manufacturing Science and Engineering Conference, 395-400, October 15–18, 2007
Publisher: American Society of Mechanical Engineers
Paper No: MSEC2007-31163
https://doi.org/10.1115/MSEC2007-31163
View Paper titled, Design and Fabrication of Micro Photonic Sensors for Manufacturing
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Topics: Design, Manufacturing, Sensors, Metals, Optical materials, Q-factor, Semiconductor wafers, Testing, Thermomechanics, Thin films
Journal Articles

Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors

Xugang Zhang, Hongrui Jiang, Xiaochun Li
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Special Section: Micromanufacturing
J. Manuf. Sci. Eng. June 2008, 130(3): 031104.
https://doi.org/10.1115/1.2917356
Published Online: May 5, 2008
View Article titled, Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors
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Topics: Design, Manufacturing, Metals, Sensors, Temperature, Waveguides
Journal Articles

Study on Embedding and Integration of Microsensors Into Metal Structures for Manufacturing Applications

Xudong Cheng, Arindom Datta, Hongseok Choi, Xugang Zhang, Xiaochun Li
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. April 2007, 129(2): 416–424.
https://doi.org/10.1115/1.2515456
Published Online: September 25, 2006
View Article titled, Study on Embedding and Integration of Microsensors Into Metal Structures for Manufacturing Applications
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Topics: Manufacturing, Metals, Microsensors, Sensors, Thin films, Welding, Nickel, Thermocouples, Electroplating, Metalwork