The effect of residual stress in the surface layer on the deformation of elastic-plastic layered media due to indentation and sliding contact loading and unloading was analyzed with the finite element method. A three-dimensional finite element model of a rigid sphere interacting with a deformable layered medium was developed, and its accuracy was evaluated by contrasting finite element results with analytical solutions for the surface stresses of an elastic homogeneous half-space subjected to normal and friction surface traction. Deformation of the layered medium is interpreted in terms of the dependence of the von Mises equivalent stress, first principal stress, and equivalent plastic strain on the magnitudes of residual stress and coefficient of friction. The effect of residual stress on the propensity for yielding and cracking in the layered medium is discussed in the context of results for the maximum Mises and tensile stresses and the evolution of plasticity in the subsurface. It is shown that the optimum residual stress in the surface layer depends on the type of contact loading (indentation or sliding), coefficient of friction, and dominant deformation mode in the layer (i.e., plastic deformation or cracking).

1.
Nix
,
W. D.
,
1989
, “
Mechanical Properties of Thin Films
,”
Metall. Trans. A
,
20A
, pp.
2217
2245
.
2.
Mehregany
,
M.
,
Tong
,
L.
,
Matus
,
L. G.
, and
Larkin
,
D. J.
,
1997
, “
Internal Stress and Elastic Modulus Measurements on Micromachined 3C-SiC Thin Films
,”
IEEE Trans. Electron Devices
,
44
, pp.
74
79
.
3.
Lu
,
W.
, and
Komvopoulos
,
K.
,
2000
, “
Implanted Argon Atoms as Sensing Probes of Residual Stress in Ultrathin Films
,”
Appl. Phys. Lett.
,
76
, pp.
3206
3208
.
4.
Kao
,
A. S.
,
Doerner
,
M. F.
, and
Novotny
,
V. J.
,
1989
, “
Processing Effects on the Tribological Characteristics of Reactively Sputtered Chromium Oxide Cr2O3 Overcoat Films
,”
J. Appl. Phys.
,
66
, pp.
5315
5321
.
5.
Mounier
,
E.
,
Juliet
,
P.
,
Quesnel
,
E.
, and
Pauleau
,
Y.
,
1995
, “
Dependence of Tribological Properties on Deposition Parameters for Nonhydrogenated Amorphous Carbon Films Produced by Magnetron Sputtering
,”
Surf. Coat. Technol.
,
77
, pp.
548
552
.
6.
Mounier
,
E.
, and
Pauleau
,
Y.
,
1997
, “
Mechanisms of Intrinsic Stress Generation in Amorphous Carbon Thin Films Prepared by Magnetron Sputtering
,”
Diamond Relat. Mater.
,
6
, pp.
1182
1191
.
7.
Scharf
,
T. W.
, and
Barnard
,
J. A.
,
1997
, “
Nanotribology of Ultrathin a:SiC/SiC-N Overcoats Using a Depth Sensing Nanoindentation Multiple Sliding Technique
,”
Thin Solid Films
,
308–309
, pp.
340
344
.
8.
Herr
,
W.
, and
Broszeit
,
E.
,
1997
, “
Effect of an Annealing Process on the Tribological Properties of Sputtered Hard Coatings
,”
Surf. Coat. Technol.
,
97
, pp.
669
674
.
9.
Kato
,
K.
,
Bai
,
M.
,
Umehara
,
N.
, and
Miyake
,
Y.
,
1999
, “
Effect of Internal Stress of CNx Coating on its Wear in Sliding Friction
,”
Surf. Coat. Technol.
,
113
, pp.
233
241
.
10.
Zhong
,
D.
,
Sutter
,
E.
,
Moore
,
J. J.
,
Mustoe
,
G. G. W.
,
Levashov
,
E. A.
, and
Disam
,
J.
,
2001
, “
Mechanical Properties of Ti-B-C-N Coatings Deposited by Magnetron Sputtering
,”
Thin Solid Films
,
398–399
, pp.
320
325
.
11.
Bai
,
M.
,
Kato
,
K.
,
Umehara
,
N.
, and
Miyake
,
Y.
,
2000
, “
Nanoindentation and FEM Study of the Effect of Internal Stress on Micro/Nano Mechanical Property of Thin CNx Films
,”
Thin Solid Films
,
377–378
, pp.
138
147
.
12.
Komvopoulos
,
K.
, and
Ye
,
N.
,
2002
, “
Elastic-Plastic Finite Element Analysis for the Head-Disk Interface With Fractal Topography Description
,”
ASME J. Tribol.
,
124
, pp.
775
784
.
13.
Komvopoulos
,
K.
,
2000
, “
Head-Disk Interface Contact Mechanics for Ultrahigh Density Magnetic Recording
,”
Wear
,
238
, pp.
1
11
.
14.
Huber, M. T., 1904, “Zur Theorie der Beru¨hrung Fester Elastische Ko¨rper,” Annalen der Physik, 14, pp. 153–163.
15.
Hills, D. A., Nowell, D., and Sackfield, A., 1993, Mechanics of Elastic Contacts, Butterworth-Heinemann, Oxford, UK, pp. 202–204.
16.
Hamilton
,
G. M.
,
1983
, “
Explicit Equations for the Stresses Beneath a Sliding Spherical Contact
,”
Proc. Inst. Mech. Eng., Part C: Mech. Eng. Sci.
,
197C
, pp.
53
59
.
17.
Lu
,
W.
, and
Komvopoulos
,
K.
,
1999
, “
Dependence of Growth and Nanomechanical Properties of Ultrathin Amorphous Carbon Films on Radio Frequency Sputtering Conditions
,”
J. Appl. Phys.
,
86
, pp.
2268
2277
.
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