The stiction forces that exist in microelectromechanical systems (MEMS) are characterized by surface energy and surface roughness. To simulate this contact condition, a three-dimensional fractal surface geometry and an adhesive contact model for a single asperity are used together to create a numerical adhesive rough surface solution methodology. This novel method of solution determines the characteristic adhesive contact type for each individual asperity uniquely at the time of load and area integration. Such a simulation more accurately represents the physics of the asperity-based contact. Numerical results for the adherence force are presented as a function of surface topography, interface compliance, and the work of adhesion for a MEMS interface. The magnitude of the force required to separate an adhesive rough surface interface is given in relation to a polysilicon system.

Issue Section:
Technical Papers
Keywords:
silicon, elemental semiconductors, micromechanical devices, mechanical contact, adhesion, stiction, rough surfaces, surface roughness, surface topography, surface energy, numerical analysis, iterative methods, fractals
Topics:
Adhesives, Microelectromechanical systems, Surface roughness, Fractals, Adhesion, Algorithms, Surface energy
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