Effects of partial pressure of methane on deposition rate, hardness, bonding strength and friction coefficient of TiAlN/TiAlC0.37N0.63 multilayer coating were investigated. The TiAlN coating was deposited at a N2 flow rate of 70 sccm, and TiAlC0.37N0.63 coating were deposited at a N2 flow rate of 35 sccm and a CH4 flow rate of 35 sccm. TiAlN/TiAlC0.37N0.63 multilayer coatings with different modulation periods but the same total thickness of 3.56 μm were deposited on high speed steel (HSS) substrates using multi-arc ion plating technology. Microhardness and tribological measurement show that the multilayer coating with a modulating ratio of 1:1 and a modulation period of 68 nm had a hardness of 2793.9 HV0.10, an excellent bonding strength of 52 N, and the minimum friction coefficient of 0.46 and a relatively low wear rate.
Issue Section:
Coatings and Solid Lubricants
References
1.
Musil
, J.
, 2000
, “Hard and Superhard Nanocomposite Coatings
,” Surf. Coat. Technol.
, 125
(1–3
), pp. 322
–330
.2.
Shouyu
, Z.
, and Dejun
, K.
, 2017
, “Microstructures and Friction–Wear Behaviors of Cathodic Arc Ion Plated Chromium Nitride Coatings at High Temperatures
,” ASME J. Tribol.
, 140
(3
), p. 031602
.3.
Rachbauer
, R.
, Gengler
, J. J.
, Voevodin
, A. A.
, Resch
, K.
, and Mayrhofer
, P. H.
, 2012
, “Temperature Driven Evolution of Thermal, Electrical, and Optical Properties of Ti–Al–N Coatings
,” Acta Mater.
, 60
(5
), pp. 2091
–2096
.4.
Cai
, F.
, Zhang
, S.
, Li
, J.
, Chen
, Z.
, Li
, M.
, and Wang
, L.
, 2011
, “Effect of Nitrogen Partial Pressure on Al–Ti–N Films Deposited by Arc Ion Plating
,” Appl. Surf. Sci.
, 258
(5
), pp. 1819
–1825
.5.
Zhou
, W.
, Liang
, J.
, Zhang
, F.
, Mu
, J.
, and Zhao
, H.
, 2014
, “A Comparative Research on TiAlN Coatings Reactively Sputtered From Powder and From Smelting TiAl Targets at Various Nitrogen Flow Rates
,” Appl. Surf. Sci.
, 313
, pp. 10
–18
.6.
Chen
, L.
, Xu
, Y. X.
, Du
, Y.
, and Liu
, Y.
, 2015
, “Effect of Bilayer Period on Structure, Mechanical and Thermal Properties of TiAlN/AlTiN Multilayer Coatings
,” Thin Solid Films
, 592
(Pt. A), pp. 207
–214
.7.
Zeng
, Y.
, Qiu
, Y.
, Mao
, X.
, Tan
, S.
, Tan
, Z.
, Zhang
, X.
, Chen
, J.
, and Jiang
, J.
, 2015
, “Superhard TiAlCN Coatings Prepared by Radio Frequency Magnetron Sputtering
,” Thin Solid Films
, 584
, pp. 283
–288
.8.
Chen
, L.
, He
, L.
, Xu
, Y.
, Zhou
, L.
, Pei
, F.
, and Du
, Y.
, 2014
, “Influence of ZrN on Oxidation Resistance of Ti–Al–N Coating
,” Surf. Coat. Technol.
, 244
, pp. 87
–91
.9.
Miletić
, A.
, Panjan
, P.
, Škorić
, B.
, Čekada
, M.
, Dražič
, G.
, and Kovač
, J.
, 2014
, “Microstructure and Mechanical Properties of Nanostructured Ti–Al–Si–N Coatings Deposited by Magnetron Sputtering
,” Surf. Coat. Technol.
, 241
, pp. 105
–111
.10.
Fernandes
, F.
, Loureiro
, A.
, Polcar
, T.
, and Cavaleiro
, A.
, 2014
, “The Effect of Increasing V Content on the Structure, Mechanical Properties and Oxidation Resistance of Ti–Si–V–N Films Deposited by DC Reactive Magnetron Sputtering
,” Appl. Surf. Sci.
, 289
, pp. 114
–123
.11.
Veprek
, S.
, Veprek-Heijman
, M. G. J.
, Karvankova
, P.
, and Prochazka
, J.
, 2005
, “Different Approaches to Superhard Coatings and Nanocomposites
,” Thin Solid Films
, 476
(1
), pp. 1
–29
.12.
Musil
, J.
, and Jirout
, M.
, 2007
, “Toughness of Hard Nanostructured Ceramic Thin Films
,” Surf. Coat. Technol.
, 201
(9–11
), pp. 5148
–5152
.13.
Zhang
, S.
, Sun
, D.
, Fu
, Y.
, and Du
, H.
, 2005
, “Toughening of Hard Nanostructural Thin Films: A Critical Review
,” Surf. Coat. Technol.
, 198
(1–3
), pp. 2
–8
.14.
Zhou
, Z.
, Rainforth
, W. M.
, Lewis
, D. B.
, Creasy
, S.
, Forsyth
, J. J.
, Clegg
, F.
, Ehiasarian
, A. P.
, Hovespian
, P. E.
, and Münz
, W. D.
, 2004
, “Oxidation Behaviour of Nanoscale TiAlN/VN Multilayer Coatings
,” Surf. Coat. Technol.
, 177–178
, pp. 198
–203
.15.
Kulkarni
, A. P.
, and Sargade
, V. G.
, 2015
, “Characterization and Performance of AlTiN, AlTiCrN, TiN/TiAlN PVD Coated Carbide Tools While Turning SS 304
,” Mater. Manuf. Processes
, 30
(6
), pp. 748
–755
.16.
Shang
, H.
, Li
, J.
, and Shao
, T.
, 2014
, “Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition
,” Appl. Surf. Sci.
, 310
, pp. 317
–320
.17.
Sakurai
, M.
, Toihara
, T.
, Wang
, M.
, Kurosaka
, W.
, and Miyake
, S.
, 2008
, “Surface Morphology and Mechanical Properties of Nanoscale TiAlN/SiNx Multilayer Coating Deposited by Reactive Magnetron Sputtering
,” Surf. Coat. Technol.
, 203
(1–2
), pp. 171
–179
.18.
Alemón
, B.
, Flores
, M.
, Canto
, C.
, Andrade
, E.
, de Lucio
, O. G.
, Rocha
, M. F.
, and Broitman
, E.
, 2014
, “Ion Beam Analysis, Corrosion Resistance and Nanomechanical Properties of TiAlCN/CNx Multilayer Grown by Reactive Magnetron Sputtering
,” Nucl. Instrum. Methods Phys. Res., Sect. B
, 331
, pp. 134
–139
.19.
Jang
, C. S.
, Jeon
, J.-H.
, Song
, P. K.
, Kang
, M. C.
, and Kim
, K. H.
, 2005
, “Synthesis and Mechanical Properties of TiAlCxN1−x Coatings Deposited by Arc Ion Plating
,” Surf. Coat. Technol.
, 200
(5–6
), pp. 1501
–1506
.20.
Zhang
, X.
, Jiang
, J.
, Yuqiao
, Z.
, Lin
, J.
, Wang
, F.
, and Moore
, J. J.
, 2008
, “Effect of Carbon on TiAlCN Coatings Deposited by Reactive Magnetron Sputtering
,” Surf. Coat. Technol.
, 203
(5–7
), pp. 594
–597
.21.
Zhang
, S.
, Wang
, L.
, Wang
, Q.
, and Li
, M.
, 2013
, “A Superhard CrAlSiN Superlattice Coating Deposited by a Multi-Arc Ion Plating: II. Thermal Stability and Oxidation Resistance
,” Surf. Coat. Technol.
, 214
, pp. 153
–159
.22.
Zhang
, X.
, Qiu
, Y.
, Tan
, Z.
, Lin
, J.
, Xu
, A.
, Zeng
, Y.
, Moore
, J. J.
, and Jiang
, J.
, 2014
, “Effect of Al Content on Structure and Properties of TiAlCN Coatings Prepared by Magnetron Sputtering
,” J. Alloys Compd.
, 617
, pp. 81
–85
.23.
Al-Bukhaiti
, M. A.
, Al-Hatab
, K. A.
, Tillmann
, W.
, Hoffmann
, F.
, and Sprute
, T.
, 2014
, “Tribological and Mechanical Properties of Ti/TiAlN/TiAlCN Nanoscale Multilayer PVD Coatings Deposited on AISI H11 Hot Work Tool Steel
,” Appl. Surf. Sci.
, 318
, pp. 180
–190
.24.
Wang
, L.
, Zhang
, S.
, Chen
, Z.
, Li
, J.
, and Li
, M.
, 2012
, “Influence of Deposition Parameters on Hard Cr–Al–N Coatings Deposited by Multi-Arc Ion Plating
,” Appl. Surf. Sci.
, 258
(8
), pp. 3629
–3636
.25.
Pfeiler-Deutschmann
, M.
, Mayrhofer
, P. H.
, Chladil
, K.
, Penoy
, M.
, Michotte
, C.
, Kathrein
, M.
, and Mitterer
, C.
, 2015
, “Effect of Wavelength Modulation of Arc Evaporated Ti–Al–N/Ti–Al–V–N Multilayer Coatings on Microstructure and Mechanical/Tribological Properties
,” Thin Solid Films
, 581
, pp. 20
–24
.26.
Lei
, Z.
, Liu
, Y.
, Ma
, F.
, Song
, Z.
, and Li
, Y.
, 2016
, “Oxidation Resistance of TiAlN/ZrN Multilayer Coatings
,” Vacuum
, 127
, pp. 22
–29
.Copyright © 2018 by ASME
You do not currently have access to this content.
