In this study, the Mo-alloyed HfN films were prepared by DC-magnetron sputtering and studied their tribological properties at 25–600 °C under dry friction conditions. The relationship between H/E value and tribological properties at elevated temperature was illustrated. A single solid-solution phase was formed for all Hf-Mo-N films which with an FCC structure, and the H/E and H3/E2 values are increased. The film with x = 0.56 obtained a lower friction coefficient (0.4) and wear-rate (1.23 × 10−6 mm3/N m) at room temperature. At elevated temperature, this film maintained high structure stability, meanwhile, a dense and continuous oxide layer with lubrication was formed and tightly covered on the worn surface, that it obtained a lower coefficients of friction and better wear resistance.